Operational

Now

Source characteristics

Bend magnet

Energy range

50–1000 eV

Monochromator

VLS-PGM

Calculated flux (1.9 GeV, 400 mA)

10¹¹ photons/s/0.01%BW at 100 eV

Resolving power (E/DE)

7000

Endstations

Scanning bright field and dark field mask inspection

Spot size at sample

2.5 x 4 µm

Local contact

Name: Moonsuk Yi
Phone: (510) 486-4954
Email: msyi@lbl.gov

Spokesperson

Name: Jeffrey Bokor
Affiliation: Univ. of California, Berkeley;
Center for X-Ray Optics, Berkeley Lab
Phone: (510) 642-4134
Fax: (510) 642-2739
Email: jbokor@eecs.berkeley.edu

Beamline phone number

(510) 495-2117