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Beamline 12.0

EUV optics testing and interferometry, angle- and spin-resolved photoemission (12.0.1)

Operational	See endstation tables
Source characteristics	8-cm-period undulator (U8)
Energy range	See endstation tables
Monochromator	See endstation tables
Endstations	Angle- and spin-resolved photoemission (12.0.1.1) EUV interferometer (12.0.1.2) EUV interferometer (12.0.1.3)
Beamline phone numbers	(510) 495-2120, (510) 495-2121

Endstation	Angle- and spin-resolved photoemission (12.0.1.1)
Operational	Now
Energy range	24–350 eV
Monochromator	VLS-PGM (200-, 300-, 600-, and 1200-line/mm gratings)
Calculated flux (1.9 GeV, 400 mA)	~5 x 10¹³ photons/s/1%BW at 134 eV
Resolving power (E/ΔE)	Grating-dependent, typically from 5,000 to 10,000
Detectors	Scienta SES 100 (angle-resolved photoemission)
Samples
Format	UHV-compatible solids
Preparation	Sample manipulator with five degrees of freedom; temperature control from 10 to 375 K Evaporation, ion sputtering, high-temperature annealing, UHV cleave
Sample environment	UHV
Scientific applications	Angle- and spin-resolved photoemission
Local contact	Name: Alexei Fedorov Phone: (510) 486-7521 Fax: (510) 495-2067
Spokespersons	Name: Dan Dessau Affiliation: Univ. of Colorado at Boulder Phone: (303) 492-1607 Fax: (303) 492-2998

Endstation	EUV interferometer (12.0.1.2)
Operational	Now
Energy range	60–320 eV
Monochromator	VLS-PGM
Calculated flux (1.9 GeV, 400 mA)	~5 x 10¹³ photons/s/1%BW at 134 eV
Resolving power (E/ΔE)	200-10,000
Detectors	GaAsP flux monitor, silicon 1024 x 1024 CCD array
Samples
Preparation	All-reflective, multilayer-coated EUV optics
Sample environment	10^-7 or 10^-4 Torr O₂
Special notes	Interferometer stations also support different modes of high -resolution EUV pattern transfer capabilities
Scientific applications	Interferometric wavefront measurement of optics designed for EUV lithography
Local contacts	Name: Kenneth Goldberg Phone: (510) 495-2261 Fax: (510) 486-4550	Name: Patrick Naulleau Phone: (510) 486-4529 Fax: (510) 486-4550
Spokespersons	Name: Erik Anderson Affiliation:Center for X-Ray Optics, Berkeley Lab Phone: (510) 486-4446 Fax: (510) 486-4955	Name: David Attwood Affiliation: EUV/LLC Phone: (510) 486-4463 Fax: (510) 486-4955

Endstation	EUV interferometer (12.0.1.3)
Operational	Now
Energy range	60–320 eV
Monochromator	VLS-PGM
Calculated flux (1.9 GeV, 400 mA)	~5 x 10¹³ photons/s/1%BW at 134 eV
Resolving power (E/ΔE)	200-10,000
Detectors	GaAsP flux monitor, silicon 1024 x 1024 CCD array
Samples
Preparation	All-reflective, multilayer-coated EUV optics
Sample environment	10^-7 or 10^-4 Torr O₂
Special notes	Interferometer stations also support different modes of high -resolution EUV pattern transfer capabilities
Scientific applications	Interferometric wavefront measurement of optics designed for EUV lithography
Local contacts	Name: Kenneth Goldberg Phone: (510) 495-2261 Fax: (510) 486-4550	Name: Patrick Naulleau Phone: (510) 486-4529 Fax: (510) 486-4550
Spokespersons	Name: Erik Anderson Affiliation:Center for X-Ray Optics, Berkeley Lab Phone: (510) 486-4446 Fax: (510) 486-4955	Name: David Attwood Affiliation: EUV/LLC Phone: (510) 486-4463 Fax: (510) 486-4955

A manual for this beamline is available as a PDF file.

Coherent soft x-ray science

Operational	Now
Source characteristics	Third harmonic of 8-cm-period undulator (U8)
Energy range	200–1000 eV
Monochromator	VLS-PGM, with two gratings (600 and 1200 lines/mm)
Calculated flux (1.9 GeV, 400 mA)	~4.4 x 10¹⁰ photons/s/0.1%BW at 500 eV
Resolving power (E/DE)	Resolving power (E/DE) 155 to 1000
Endstations	Coherent optics (12.0.2.1) Coherent scattering (12.0.2.2)
Detectors	Detectors CCD, photodiode, scintillator
Spot size at sample (FWHM)	60 x 9.4 µm (12.0.2.1) 85 x 8 µm (12.0.2.2)
Samples
Format Preparation	Various
Sample environment	10^-6 or 10^-5 Torr O₂ (12.0.2.1)
Experimental techniques	Two chambers: Coherent optics (12.0.2.1) Coherent scattering, correlation spectroscopy (12.0.2.2)
Scientific applications	Branchlines designed for spatially coherent soft x-ray experiments
Local contacts	Name: Yanwei Liu (12.0.2.1) Phone: (510) 486-6103 Fax: (510) 486-4550	Name: Keoki Seu (12.0.2.2) Phone: (510) 495-2830
Spokespersons	Name: David Attwood Affiliation: UC Berkeley Phone: (510) 486-4463 Fax: (510) 486-4955	Name: Stephen Kevan Affiliation: University of Oregon Phone: (541) 346-4742 Fax: (541) 346-3422
Beamline phone numbers	(510) 495-2107

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Diagram of all beamlines